Confocal profiling of grooves and ridges with circular section using the divided aperture technique
The divided-pupil technique for the simulation of confocal imaging is applied to remove those artifacts appearing due to the symmetry of the object. A rigorous treatment is used to model the imaging system which is a two-dimensional confocal microscope, working in reflection mode. Since the geometry of the associated electromagnetic problem is 2-D, the objects analyzed are highly symmetric and cylindrical. The advantages and limitations of this technique are discussed and shown by means of examples.
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| Main Author: | |
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| Format: | Digital revista |
| Language: | English |
| Published: |
Sociedad Mexicana de Física
2005
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| Online Access: | http://www.scielo.org.mx/scielo.php?script=sci_arttext&pid=S0035-001X2005000400012 |
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| Summary: | The divided-pupil technique for the simulation of confocal imaging is applied to remove those artifacts appearing due to the symmetry of the object. A rigorous treatment is used to model the imaging system which is a two-dimensional confocal microscope, working in reflection mode. Since the geometry of the associated electromagnetic problem is 2-D, the objects analyzed are highly symmetric and cylindrical. The advantages and limitations of this technique are discussed and shown by means of examples. |
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