Optimized desing of a pressure sensor for high temperature applications based on Ta and Ta N thin films /
Abstract: inglés y español
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| Main Author: | |
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| Format: | Texto biblioteca |
| Language: | eng |
| Published: |
[?] : Universidad Nacional del Comahue. Facultad de Ingeniería,
2008
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| Subjects: | SILICIO, INGENIERIA ELECTRONICA, MICROSENSORES DE PRESION, TANTALIO (Ta), NITRURO DE TANTALIO (TaN), MATERIALES CONVENCIONALES, SENSOR DE PRESION, GALGA EXTENSIOMETRICA, PELICULAS DELGADAS, CERAMICOS SINTERIZADOS A BAJA TEMPERATURA, |
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