Scanning Electron Microscopy [electronic resource] : Physics of Image Formation and Microanalysis /

The aim of this book is to outline the physics of image formation, electron­ specimen interactions, imaging modes, the interpretation of micrographs and the use of quantitative modes "in scanning electron microscopy (SEM). lt forms a counterpart to Transmission Electron Microscopy (Vol. 36 of this Springer Series in Optical Sciences) . The book evolved from lectures delivered at the University of Münster and from a German text entitled Raster-Elektronenmikroskopie (Springer-Verlag), published in collaboration with my colleague Gerhard Pfefferkorn. In the introductory chapter, the principles of the SEM and of electron­ specimen interactions are described, the most important imaging modes and their associated contrast are summarized, and general aspects of eiemental analysis by x-ray and Auger electron emission are discussed. The electron gun and electron optics are discussed in Chap. 2 in order to show how an electron probe of small diameter can be formed, how the elec­ tron beam can be blanked at high frequencies for time-resolving exper­ iments and what problems have tobe taken into account when focusing.

Bibliographic Details

Main Authors:	Reimer, Ludwig. author., SpringerLink (Online service)
Format:	Texto biblioteca
Language:	eng
Published:	Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 1985
Subjects:	Physics., Solid state physics., Spectroscopy., Microscopy., Solid State Physics., Spectroscopy and Microscopy.,
Online Access:	http://dx.doi.org/10.1007/978-3-662-13562-4
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