Sensor Technology 2001 [electronic resource] : Proceedings of the Sensor Technology Conference 2001, held in Enschede, The Netherlands 14–15 May, 2001 /

Measurement System for Biochemical Analysis Based on Capillary Electrophoresis and Microscale Conductivity Detection -- Electro-Osmotic Flow Control in Microfluidics Systems -- Flow Sensing Using the Temperature Distribution along a Heated Microbeam -- Temperature-Balance Micro Flow Sensor System Based on a Free Oscillating Differential Power Controller -- Technology for Spatial Light Modulators Based on Reflective Silicon Structures -- Building of a Highly Sensitive Two-Channel Integrated Optical Young Interferometer as the First Step Towards Constructing an Integrated Multichannel Interferometer Immunosensor -- High Speed Integrated Cmos Wavefront Sensor -- Automotive Sensor Development: Success Guaranteed? -- Study On The Behaviour of Various Si Substrate Geometries for Use as Passive Heat Sink -- Transfer Mould Packaging For Sensors -- Inexpensive Mems Packaging -- Low-Cost System to Determine the X-Y Position in a Resistive Touch-Screen -- High Capacity Silicon Load Cells -- Thermopile Design For A Cmos Wind-Sensor -- Investigation of Relative Humidity Sensors Based on Porous Silicon, Porous Polysilicon And Porous Silicon Carbide -- Limitations And Complementary Value Of Cryogenic Sf6-O2 And Bosch Plasma Etch Process For Silicon Micromachining -- Fabrication Of Mechanical Structures Using Macro-Porous Silicon -- Fine Tuning The Surface Roughness of Powder Blasted Glass Surfaces -- On the Feasibility of Using Antifuses as Low-Power Heating/Detecting Elements in Pellistor-Type Gas Sensors -- Amperometric Sensor for Detection of Redox Activity -- Accurate Quantitative Measurement of E-Field Distributions in “SOLID” Phantoms Using A Flexible Schottky Diode Sheet -- A Simple Selfpriming Bubble-Tolerant Peristaltic Micropump -- HF Etching of Si-Oxides and Si-Nitrides for Surface Micromachining -- A Light Absorption Cell for ?-Tas With Koh/Ipa Etched 45° Mirrors in Silicon -- A Low-Cost And Accurate Conductance-Measurement System -- An Improved Sensor-Actuator System for Dynamic Surface Tension Measurements -- DNA Condensation Caused By Ligand Binding May Serve As A Sensor -- Forming A Rounded Convex Corner By Using Two-Step Anisotropic Koh Wet Etching -- An Accurate Measurement System for Thermopiles -- Packaged Stainless Steel Flowsensor -- Micro-Machining Of A Cryogenic Imaging Array Of Transition Edge X-Ray Microcalorimeters -- Enzyme Immobilisation Studies for Sensor Applications -- Micromachined SI-Well Scintillator Pixel Sensors for Thermal Neutron Detection -- Author Index.

Bibliographic Details

Main Authors:	Elwenspoek, Miko. editor., SpringerLink (Online service)
Format:	Texto biblioteca
Language:	eng
Published:	Dordrecht : Springer Netherlands : Imprint: Springer, 2001
Subjects:	Materials science., Manufacturing industries., Machines., Tools., Electrical engineering., Optical materials., Electronic materials., Materials Science., Optical and Electronic Materials., Characterization and Evaluation of Materials., Electrical Engineering., Manufacturing, Machines, Tools.,
Online Access:	http://dx.doi.org/10.1007/978-94-010-0840-2
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