Sputtering by Particle Bombardment I [electronic resource] : Physical Sputtering of Single-Element Solids /
and overview -- Sputtering by ion bombardment theoretical concepts -- Theoretical aspects of monocrystal sputtering -- Sputtering yield measurements -- Sputtering yields of single crystalline targets.
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Main Authors: | Behrisch, Rainer. editor., SpringerLink (Online service) |
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Format: | Texto biblioteca |
Language: | eng |
Published: |
Berlin, Heidelberg : Springer Berlin Heidelberg,
1981
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Subjects: | Physics., Solid state physics., Spectroscopy., Microscopy., Solid State Physics., Spectroscopy and Microscopy., |
Online Access: | http://dx.doi.org/10.1007/3-540-10521-2 |
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