Sputtering by Particle Bombardment I [electronic resource] : Physical Sputtering of Single-Element Solids /

and overview -- Sputtering by ion bombardment theoretical concepts -- Theoretical aspects of monocrystal sputtering -- Sputtering yield measurements -- Sputtering yields of single crystalline targets.

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Bibliographic Details
Main Authors: Behrisch, Rainer. editor., SpringerLink (Online service)
Format: Texto biblioteca
Language:eng
Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 1981
Subjects:Physics., Solid state physics., Spectroscopy., Microscopy., Solid State Physics., Spectroscopy and Microscopy.,
Online Access:http://dx.doi.org/10.1007/3-540-10521-2
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