Sputtering by Particle Bombardment I [electronic resource] : Physical Sputtering of Single-Element Solids /

Sputtering by Particle Bombardment I [electronic resource] : Physical Sputtering of Single-Element Solids /

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and overview -- Sputtering by ion bombardment theoretical concepts -- Theoretical aspects of monocrystal sputtering -- Sputtering yield measurements -- Sputtering yields of single crystalline targets.

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Bibliographic Details
Main Authors: Behrisch, Rainer. editor., SpringerLink (Online service)
Format: Texto biblioteca
Language:eng
Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 1981
Subjects:Physics., Solid state physics., Spectroscopy., Microscopy., Solid State Physics., Spectroscopy and Microscopy.,
Online Access:http://dx.doi.org/10.1007/3-540-10521-2
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id KOHA-OAI-TEST:181790
record_format koha
spelling KOHA-OAI-TEST:1817902018-07-30T23:02:11ZSputtering by Particle Bombardment I [electronic resource] : Physical Sputtering of Single-Element Solids / Behrisch, Rainer. editor. SpringerLink (Online service) textBerlin, Heidelberg : Springer Berlin Heidelberg,1981.engand overview -- Sputtering by ion bombardment theoretical concepts -- Theoretical aspects of monocrystal sputtering -- Sputtering yield measurements -- Sputtering yields of single crystalline targets.Physics.Solid state physics.Spectroscopy.Microscopy.Physics.Solid State Physics.Spectroscopy and Microscopy.Springer eBookshttp://dx.doi.org/10.1007/3-540-10521-2URN:ISBN:9783540385141
institution COLPOS
collection Koha
country México
countrycode MX
component Bibliográfico
access En linea
En linea
databasecode cat-colpos
tag biblioteca
region America del Norte
libraryname Departamento de documentación y biblioteca de COLPOS
language eng
topic Physics.
Solid state physics.
Spectroscopy.
Microscopy.
Physics.
Solid State Physics.
Spectroscopy and Microscopy.
Physics.
Solid state physics.
Spectroscopy.
Microscopy.
Physics.
Solid State Physics.
Spectroscopy and Microscopy.
spellingShingle Physics.
Solid state physics.
Spectroscopy.
Microscopy.
Physics.
Solid State Physics.
Spectroscopy and Microscopy.
Physics.
Solid state physics.
Spectroscopy.
Microscopy.
Physics.
Solid State Physics.
Spectroscopy and Microscopy.
Behrisch, Rainer. editor.
SpringerLink (Online service)
Sputtering by Particle Bombardment I [electronic resource] : Physical Sputtering of Single-Element Solids /
description and overview -- Sputtering by ion bombardment theoretical concepts -- Theoretical aspects of monocrystal sputtering -- Sputtering yield measurements -- Sputtering yields of single crystalline targets.
format Texto
topic_facet Physics.
Solid state physics.
Spectroscopy.
Microscopy.
Physics.
Solid State Physics.
Spectroscopy and Microscopy.
author Behrisch, Rainer. editor.
SpringerLink (Online service)
author_facet Behrisch, Rainer. editor.
SpringerLink (Online service)
author_sort Behrisch, Rainer. editor.
title Sputtering by Particle Bombardment I [electronic resource] : Physical Sputtering of Single-Element Solids /
title_short Sputtering by Particle Bombardment I [electronic resource] : Physical Sputtering of Single-Element Solids /
title_full Sputtering by Particle Bombardment I [electronic resource] : Physical Sputtering of Single-Element Solids /
title_fullStr Sputtering by Particle Bombardment I [electronic resource] : Physical Sputtering of Single-Element Solids /
title_full_unstemmed Sputtering by Particle Bombardment I [electronic resource] : Physical Sputtering of Single-Element Solids /
title_sort sputtering by particle bombardment i [electronic resource] : physical sputtering of single-element solids /
publisher Berlin, Heidelberg : Springer Berlin Heidelberg,
publishDate 1981
url http://dx.doi.org/10.1007/3-540-10521-2
work_keys_str_mv AT behrischrainereditor sputteringbyparticlebombardmentielectronicresourcephysicalsputteringofsingleelementsolids
AT springerlinkonlineservice sputteringbyparticlebombardmentielectronicresourcephysicalsputteringofsingleelementsolids
_version_ 1756264871813447680

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