Films Deposited from Reactive Sputtering of Aluminum Acetylacetonate Under Low Energy Ion Bombardment

by Battaglin,Felipe Augusto Darriba, Prado,Eduardo Silva, Caseli,Luciano, Silva,Tiago Fiorini da, Tabacniks,Manfredo Harri, Cruz,Nilson Cristino da, Rangel,Elidiane Cipriano
Published 2017

Innovative low temperature plasma approach for deposition of alumina films

by Battaglin,Felipe Augusto Darriba, Hosokawa,Ricardo Shindi, Cruz,Nilson Cristino da, Caseli,Luciano, Rangel,Elidiane Cipriano, Silva,Tiago Fiorini da, Tabacniks,Manfredo Harri
Published 2014