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1Structural and Mechanical Properties of Zr-Si-N Thin Films Prepared by Reactive Magnetron Sputteringby Freitas,Flávio Gustavo Ribeiro, Hübler,Roberto, Soares,Gabriel, Conceição,Amanda Gardênia Santos, Vitória,Edson Reis, Carvalho,Renata Gomes, Tentardini,Eduardo Kirinus
Published 2015Digital revistaSCIELO