Design and simulation of an optimized electrothermal microactuator with Z-shaped beams

The displacement of the central shuttle of a Z-shape chevron actuator can be calculated using a developed approach from other authors. Who demonstrated that the actuators with this geometry offer a larger displacement compared with V-shape actuators. Z-shape offers a larger stiffness and output force for the case of only one arm. This paper is focused on the optimization of the Z-shaped beams of a chevron actuator of eight beams, which seeks to increase the previously described response. The structure is designed in parametric solid modeling 3D software Autodesk Inventor, and simulated by finite element method in Ansys 15.0. These simulations were implemented considering several modifications on the length of the Z-shaped beams in order to choose the most appropriate length. The electric potential applied in all cases was from 0.2 V up to 5 V. The Z-shape length of the arms for the case of the optimized Z-shape actuator increases the shuttle's displacement in approximately 50% compared to V-shape actuator, and 38% compare to the original Z-shape. Analytical adjusted approach is extremely matched with the simulations results. Length of the Z-shape beam is the determinant factor of the displacement. The low stiffness of the optimized Z-shape actuator (89% lower than the original V-shape and 58% compared to Z-shape) can allow its use as load sensor.

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Main Authors: Tecpoyotl-Torres,Margarita, Cabello-Ruiz,Ramón, Vera-Dimas,José Gerardo
Format: Digital revista
Language:English
Published: Universidad de Guanajuato, Dirección de Investigación y Posgrado 2015
Online Access:http://www.scielo.org.mx/scielo.php?script=sci_arttext&pid=S0188-62662015000300003
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spelling oai:scielo:S0188-626620150003000032016-05-25Design and simulation of an optimized electrothermal microactuator with Z-shaped beamsTecpoyotl-Torres,MargaritaCabello-Ruiz,RamónVera-Dimas,José Gerardo MEMS chevron electrothermal displacement The displacement of the central shuttle of a Z-shape chevron actuator can be calculated using a developed approach from other authors. Who demonstrated that the actuators with this geometry offer a larger displacement compared with V-shape actuators. Z-shape offers a larger stiffness and output force for the case of only one arm. This paper is focused on the optimization of the Z-shaped beams of a chevron actuator of eight beams, which seeks to increase the previously described response. The structure is designed in parametric solid modeling 3D software Autodesk Inventor, and simulated by finite element method in Ansys 15.0. These simulations were implemented considering several modifications on the length of the Z-shaped beams in order to choose the most appropriate length. The electric potential applied in all cases was from 0.2 V up to 5 V. The Z-shape length of the arms for the case of the optimized Z-shape actuator increases the shuttle's displacement in approximately 50% compared to V-shape actuator, and 38% compare to the original Z-shape. Analytical adjusted approach is extremely matched with the simulations results. Length of the Z-shape beam is the determinant factor of the displacement. The low stiffness of the optimized Z-shape actuator (89% lower than the original V-shape and 58% compared to Z-shape) can allow its use as load sensor.info:eu-repo/semantics/openAccessUniversidad de Guanajuato, Dirección de Investigación y PosgradoActa universitaria v.25 n.3 20152015-06-01info:eu-repo/semantics/articletext/htmlhttp://www.scielo.org.mx/scielo.php?script=sci_arttext&pid=S0188-62662015000300003en10.15174/au.2015.774
institution SCIELO
collection OJS
country México
countrycode MX
component Revista
access En linea
databasecode rev-scielo-mx
tag revista
region America del Norte
libraryname SciELO
language English
format Digital
author Tecpoyotl-Torres,Margarita
Cabello-Ruiz,Ramón
Vera-Dimas,José Gerardo
spellingShingle Tecpoyotl-Torres,Margarita
Cabello-Ruiz,Ramón
Vera-Dimas,José Gerardo
Design and simulation of an optimized electrothermal microactuator with Z-shaped beams
author_facet Tecpoyotl-Torres,Margarita
Cabello-Ruiz,Ramón
Vera-Dimas,José Gerardo
author_sort Tecpoyotl-Torres,Margarita
title Design and simulation of an optimized electrothermal microactuator with Z-shaped beams
title_short Design and simulation of an optimized electrothermal microactuator with Z-shaped beams
title_full Design and simulation of an optimized electrothermal microactuator with Z-shaped beams
title_fullStr Design and simulation of an optimized electrothermal microactuator with Z-shaped beams
title_full_unstemmed Design and simulation of an optimized electrothermal microactuator with Z-shaped beams
title_sort design and simulation of an optimized electrothermal microactuator with z-shaped beams
description The displacement of the central shuttle of a Z-shape chevron actuator can be calculated using a developed approach from other authors. Who demonstrated that the actuators with this geometry offer a larger displacement compared with V-shape actuators. Z-shape offers a larger stiffness and output force for the case of only one arm. This paper is focused on the optimization of the Z-shaped beams of a chevron actuator of eight beams, which seeks to increase the previously described response. The structure is designed in parametric solid modeling 3D software Autodesk Inventor, and simulated by finite element method in Ansys 15.0. These simulations were implemented considering several modifications on the length of the Z-shaped beams in order to choose the most appropriate length. The electric potential applied in all cases was from 0.2 V up to 5 V. The Z-shape length of the arms for the case of the optimized Z-shape actuator increases the shuttle's displacement in approximately 50% compared to V-shape actuator, and 38% compare to the original Z-shape. Analytical adjusted approach is extremely matched with the simulations results. Length of the Z-shape beam is the determinant factor of the displacement. The low stiffness of the optimized Z-shape actuator (89% lower than the original V-shape and 58% compared to Z-shape) can allow its use as load sensor.
publisher Universidad de Guanajuato, Dirección de Investigación y Posgrado
publishDate 2015
url http://www.scielo.org.mx/scielo.php?script=sci_arttext&pid=S0188-62662015000300003
work_keys_str_mv AT tecpoyotltorresmargarita designandsimulationofanoptimizedelectrothermalmicroactuatorwithzshapedbeams
AT cabelloruizramon designandsimulationofanoptimizedelectrothermalmicroactuatorwithzshapedbeams
AT veradimasjosegerardo designandsimulationofanoptimizedelectrothermalmicroactuatorwithzshapedbeams
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