Predictive Simulation of Semiconductor Processing [electronic resource] : Status and Challenges /
Predictive simulation of semiconductor processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.
Saved in:
Main Authors: | Dabrowski, Jarek. editor., Weber, Eicke R. editor., SpringerLink (Online service) |
---|---|
Format: | Texto biblioteca |
Language: | eng |
Published: |
Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer,
2004
|
Subjects: | Materials science., Physics., Engineering., Industrial engineering., Nanotechnology., Materials Science., Characterization and Evaluation of Materials., Mathematical Methods in Physics., Engineering, general., Operating Procedures, Materials Treatment., |
Online Access: | http://dx.doi.org/10.1007/978-3-662-09432-7 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Similar Items
-
Predictive Simulation of Semiconductor Processing [electronic resource] : Status and Challenges /
by: Dabrowski, Jarek. editor., et al.
Published: (2004) -
Laser-Assisted Microtechnology [electronic resource] /
by: Metev, Simeon M. author., et al.
Published: (1998) -
Laser-Assisted Microtechnology [electronic resource] /
by: Metev, Simeon M. author., et al.
Published: (1998) -
Nanostructured Thin Films and Nanodispersion Strengthened Coatings [electronic resource] /
by: Voevodin, Andrey A. editor., et al.
Published: (2004) -
Nanostructured Thin Films and Nanodispersion Strengthened Coatings [electronic resource] /
by: Voevodin, Andrey A. editor., et al.
Published: (2004)