Technology of Integrated Circuits [electronic resource] /
Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials , modern planar technology, process designs for CMOS, Bipolar, BICMOS and smart-power technologies, self-adjusting doping techniques are just a few of the highlights. With its strong application-orientation this is a need-to-have book for professionals in semiconductor industries. Senior students in electrical engineering and physics can use it as a textbook because of the systematic treatment of the subjects. With regard to their later careers as industrial engineers they will particularly appreciate the deep insight into the actual methods and problems of IC manufacturing.
Main Authors: | , , , , , |
---|---|
Format: | Texto biblioteca |
Language: | eng |
Published: |
Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer,
2000
|
Subjects: | Engineering., Chemical engineering., Electronics., Microelectronics., Optical materials., Electronic materials., Electronics and Microelectronics, Instrumentation., Optical and Electronic Materials., Industrial Chemistry/Chemical Engineering., |
Online Access: | http://dx.doi.org/10.1007/978-3-662-04160-4 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
id |
KOHA-OAI-TEST:212639 |
---|---|
record_format |
koha |
spelling |
KOHA-OAI-TEST:2126392018-07-30T23:45:48ZTechnology of Integrated Circuits [electronic resource] / Widmann, Dietrich. author. Mader, Hermann. author. Friedrich, Hans. author. Heywang, Walter. author. Müller, Rudolf. author. SpringerLink (Online service) textBerlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer,2000.engStrongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials , modern planar technology, process designs for CMOS, Bipolar, BICMOS and smart-power technologies, self-adjusting doping techniques are just a few of the highlights. With its strong application-orientation this is a need-to-have book for professionals in semiconductor industries. Senior students in electrical engineering and physics can use it as a textbook because of the systematic treatment of the subjects. With regard to their later careers as industrial engineers they will particularly appreciate the deep insight into the actual methods and problems of IC manufacturing.1 Introduction -- 2 Basic principles of integrated circuits technology -- 3 Film technology -- 4 Lithography -- 5 Etching technology -- 6 Doping technology -- 7 Cleaning technology -- 8 Process integration -- References.Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials , modern planar technology, process designs for CMOS, Bipolar, BICMOS and smart-power technologies, self-adjusting doping techniques are just a few of the highlights. With its strong application-orientation this is a need-to-have book for professionals in semiconductor industries. Senior students in electrical engineering and physics can use it as a textbook because of the systematic treatment of the subjects. With regard to their later careers as industrial engineers they will particularly appreciate the deep insight into the actual methods and problems of IC manufacturing.Engineering.Chemical engineering.Electronics.Microelectronics.Optical materials.Electronic materials.Engineering.Electronics and Microelectronics, Instrumentation.Optical and Electronic Materials.Industrial Chemistry/Chemical Engineering.Springer eBookshttp://dx.doi.org/10.1007/978-3-662-04160-4URN:ISBN:9783662041604 |
institution |
COLPOS |
collection |
Koha |
country |
México |
countrycode |
MX |
component |
Bibliográfico |
access |
En linea En linea |
databasecode |
cat-colpos |
tag |
biblioteca |
region |
America del Norte |
libraryname |
Departamento de documentación y biblioteca de COLPOS |
language |
eng |
topic |
Engineering. Chemical engineering. Electronics. Microelectronics. Optical materials. Electronic materials. Engineering. Electronics and Microelectronics, Instrumentation. Optical and Electronic Materials. Industrial Chemistry/Chemical Engineering. Engineering. Chemical engineering. Electronics. Microelectronics. Optical materials. Electronic materials. Engineering. Electronics and Microelectronics, Instrumentation. Optical and Electronic Materials. Industrial Chemistry/Chemical Engineering. |
spellingShingle |
Engineering. Chemical engineering. Electronics. Microelectronics. Optical materials. Electronic materials. Engineering. Electronics and Microelectronics, Instrumentation. Optical and Electronic Materials. Industrial Chemistry/Chemical Engineering. Engineering. Chemical engineering. Electronics. Microelectronics. Optical materials. Electronic materials. Engineering. Electronics and Microelectronics, Instrumentation. Optical and Electronic Materials. Industrial Chemistry/Chemical Engineering. Widmann, Dietrich. author. Mader, Hermann. author. Friedrich, Hans. author. Heywang, Walter. author. Müller, Rudolf. author. SpringerLink (Online service) Technology of Integrated Circuits [electronic resource] / |
description |
Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials , modern planar technology, process designs for CMOS, Bipolar, BICMOS and smart-power technologies, self-adjusting doping techniques are just a few of the highlights. With its strong application-orientation this is a need-to-have book for professionals in semiconductor industries. Senior students in electrical engineering and physics can use it as a textbook because of the systematic treatment of the subjects. With regard to their later careers as industrial engineers they will particularly appreciate the deep insight into the actual methods and problems of IC manufacturing. |
format |
Texto |
topic_facet |
Engineering. Chemical engineering. Electronics. Microelectronics. Optical materials. Electronic materials. Engineering. Electronics and Microelectronics, Instrumentation. Optical and Electronic Materials. Industrial Chemistry/Chemical Engineering. |
author |
Widmann, Dietrich. author. Mader, Hermann. author. Friedrich, Hans. author. Heywang, Walter. author. Müller, Rudolf. author. SpringerLink (Online service) |
author_facet |
Widmann, Dietrich. author. Mader, Hermann. author. Friedrich, Hans. author. Heywang, Walter. author. Müller, Rudolf. author. SpringerLink (Online service) |
author_sort |
Widmann, Dietrich. author. |
title |
Technology of Integrated Circuits [electronic resource] / |
title_short |
Technology of Integrated Circuits [electronic resource] / |
title_full |
Technology of Integrated Circuits [electronic resource] / |
title_fullStr |
Technology of Integrated Circuits [electronic resource] / |
title_full_unstemmed |
Technology of Integrated Circuits [electronic resource] / |
title_sort |
technology of integrated circuits [electronic resource] / |
publisher |
Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, |
publishDate |
2000 |
url |
http://dx.doi.org/10.1007/978-3-662-04160-4 |
work_keys_str_mv |
AT widmanndietrichauthor technologyofintegratedcircuitselectronicresource AT maderhermannauthor technologyofintegratedcircuitselectronicresource AT friedrichhansauthor technologyofintegratedcircuitselectronicresource AT heywangwalterauthor technologyofintegratedcircuitselectronicresource AT mullerrudolfauthor technologyofintegratedcircuitselectronicresource AT springerlinkonlineservice technologyofintegratedcircuitselectronicresource |
_version_ |
1756269096530345984 |