Aluminium surface modification by nitrogen-argon mixture PIII
Pure nitrogen, 30% argon/70% nitrogen, 50% argon/50% nitrogen, 70% argon/30% nitrogen plasma immersion ion implantation (PIII) processes onto aluminium samples has been performed at 2 to 6 kV negative bias and 50 to 150 us pulse widths, the sample temperature being established at 400 °C. Incident fluencies of ~10(18) atoms/cm² were used to investigate the diffusion behaviour and AlN phase formation in the samples. X-ray diffraction (XRD) shows the formation of the cubic phase of AlN with both pure nitrogen and all the mixtures whereas the hexagonal phase becomes apparent only in the 50% mixture and in pure nitrogen. The characteristic peak of AlN has also been determined by Raman spectroscopy. The microhardness was found to be always maximal with the 50% nitrogen 50% argon mixture.
Main Authors: | , , , , , , , , |
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Format: | Digital revista |
Language: | English |
Published: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
2009
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Online Access: | http://www.scielo.org.mx/scielo.php?script=sci_arttext&pid=S1665-35212009000200003 |
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