Confecção de um perfurador de lamínulas de vidro por corrosão ácida

A simple device for glass plate drilling, which is an important step in microfabrication procedures, is described. A reservoir of concentrated hydrofluoric acid with a hole in its bottom is affixed against the glass plate. Leakage is prevented by using a neoprene O-ring. A plastic pipet tip inserted in the reservoir, close to the corrosion region, provides forced convection by pressure variations inside it. A device to make 5 simultaneous holes in a plate is also presented. For a 140 µm thickness alkaline glass lamina and 1/8" O-ring, 5 holes are drilled in 20 min.

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Bibliographic Details
Main Authors: Silva,Heron Dominguez Torres da, Lago,Claudimir Lucio do
Format: Digital revista
Language:Portuguese
Published: Sociedade Brasileira de Química 2003
Online Access:http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0100-40422003000200022
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